Single shot radial constant shearing interferometry with axicon using Polarization camera

General interferometers realize a measurement as the difference between a reference surface and the measured surface. Therefore, the machining accuracy of the reference surface is the dominant factor limiting the accuracy of the measurement. Radial shearing interferometry is an interferometer that does not require a reference surface. Conventional radial shearing interferometers achieve shearing by expanding and contracting with a lens. The problem is that the amount of shear is proportional to the radius and the information obtained and becomes sparse as one moves away from the center. Therefore, in this paper, it is proposed a new radial shearing interferometer using two axicon. The proposed interferometer can keep the shear constant and does not require a reference surface. So the proposed radial shearing interferometer is capable of higher accuracy than conventional radial shearing interferometers. In addition, in recent years, highly sensitive polarization cameras have been developed that can obtain the polarization state of light. Polarization cameras have become widespread and have been applied to various interferometers. The polarization camera can acquire polarization images in four different directions in a single shot. By using a polarization camera in the optics of an interferometer, four different phase images can be obtained and the wavefront can be reconstructed in a single shot. Therefore, by applying a polarization camera to the optical system of the proposed radial shearing interferometer, it is possible to achieve higher measurement accuracy in a single shot than with conventional radial shearing interferometers.

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