MeSH 搜索器

Micro-Electrical-Mechanical Systems

A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
推出的年份: 2009
副标题
树号: E07.305.343, J01.637.509
MeSH 单一 ID: D055617
进入的组:
  • Micro Electrical Mechanical Systems
  • Micro-Electrical-Mechanical System
  • System, Micro-Electrical-Mechanical
  • Systems, Micro-Electrical-Mechanical
  • MEMS
  • Micro-Electro-Mechanical Systems
  • Micro Electro Mechanical Systems
  • Micro-Electro-Mechanical System
  • System, Micro-Electro-Mechanical
  • Systems, Micro-Electro-Mechanical
  • BioMEMS

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