A novel two‐dimensional atmospheric pressure plasma jet device

A novel two-dimensional atmospheric pressure plasma jet device is proposed for large-area processing. A finite element algorithm is adopted to obtain the optimized dimensions of the designed device based on microwave power reflection coefficient |S11| and electric field intensity. The plasma parameters of electron density urn:x-wiley:16128850:media:ppap202100159:ppap202100159-math-0001 and electron temperature urn:x-wiley:16128850:media:ppap202100159:ppap202100159-math-0002 within 0.1 ms after microwave power input were analyzed. When plasma is fully excited, urn:x-wiley:16128850:media:ppap202100159:ppap202100159-math-0003 is close to 3.5 × 1018 m−3, and urn:x-wiley:16128850:media:ppap202100159:ppap202100159-math-0004 is calculated to be 2 eV. Besides, an experimental system is established, and microwave power of 70 W can process 30 L of argon per minute, which shows a high energy efficiency. Two plasma jets with a width of 10 mm and a length of 5 mm are successfully excited. In addition, reflected power measured by the power meter is only 9.5% of incident power, which is in good agreement with simulation results.

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