Highly spherical SiC nanoparticles grown in nonthermal plasma

Corresponding Author

Department of Thin Films and Nanostructures, Institute of Physics Czech Academy of Sciences, Prague, Czechia

Correspondence Kateřina Kůsová, Department of Thin Films and Nanostructures, Institute of Physics Czech Academy of Sciences, Cukrovarnická 10, 16200 Prague, Czechia.