Application of ZIF-8/ZIF-67 Multilayer Films for NO2 and CO Detection

Prototypes of gas sensors with sensitive elements are made based on ZIF-8 and ZIF-67 films obtained directly on a substrate by immersion. The sensitivity of the prototypes to NO2 and CO is assessed by simultaneously analyzing the capacitive and resistive response. It is shown that the functionalization of ZIF-8 films with layers of ZIF-67/ZIF-8 leads to an increase in the sensitivity of the sensor to NO2 by more than 2 times compared to ZIF-8 films, and also allows CO detection. A sensor prototype based on ZIF-67/ZIF-8 films shows a resistive and capacitive sensitivity to NO2 of 3 and 6% (for 45 ppm), 14 and 15% (for 85 ppm), and to CO of 9 and 7% (for 6 ppm), 15 and 10% (for 10 ppm). It is shown that parallel analysis of the capacitive and resistive response makes it possible to increase the accuracy of the analysis of the sensor response when exposed to various gases and can be used as the basis for a software interface for training sensor operation using artificial intelligence.

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