An integrated optical waveguide micro‐cantilever system for chip‐based AFM

Corresponding Author

Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai, 201203 China

Correspondence

Guofang Fan, Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China.

Email: gffan@bjtu.edu.cn, liyuan@simt.com.cn

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